Products for Plasma Technology

For Plasma Technology we provide Radio Frequency Generators, Matching Networks, RF Broadband Generators, and Low Frequency Generators. These products are suitable to be used for ICP and CCP systems. They have been applied successfully in

  • Plasma Assist for Atomic Layer Deposition (ALD)
  • Atomic Layer Etching
  • RF Sputtering
  • Thin Film Coating
  • PE-CVD
  • Reactive Ion Etching (RIE)
  • Substrate Biasing
  • Electrical Asymmetry Effect (EAE) / Voltage Waveform Tailoring

Radio Frequency Generators

For RF Generators we have three different product lines. The first series – the 19 inch RFG series – comes with a large touch panel and can be configurated with the largest variety of options. The PowerCube series provides most RF needs in a small form factor of 1/2×19 inch /4U. They employ a clearly readable and easy to operate active front panel and a water cooling design starting from RF power of 1200W. The manual operation is straight forward with a Matching Eye (color LED). The PowerCube is our newest and cost effective design. There will be more models in this PowerCube series coming soon. The third RF Generator product line is the Shoebox series which does not have an active front panel. You can control it with our ControlPanel software. All RF Generators can control a connected MatchingCube or MiniMatch.

rfg-2u-001.jpgRFG-2U 2-200MHz ≤600W rfg-3u-001.jpgRFG-3U 2-100MHz ≤1000W rfg-4u-001.jpgRFG-4U 4/13.56MHz ≤2000W pc-p-001.jpgPowerCube plain 2-40MHz ≤1200W sb-001.jpgShoebox 13.56MHz ≤600W


Matching Networks

For Matching Networks we provide the MatchingCube series. It comes with air capacitors – MC-A – for lower RF power and with vacuum capacitors – MC-V – for higher RF power. The MiniMatch series is very compact because it does not contain an internal coil. Hence it is mainly made for ICP systems. All Matching Networks can be controlled by any of our RF Generators.

mc-a-001.jpgMatchingCube-A 2-40MHz ≤600W mc-v-001.jpgMatchingCube-V 2-40MHz ≤2500W mm-1-001.jpgMiniMatch 2-40MHz ≤2000W


RF Broadband Generators

The RF Broadband Generators cover a variety of large frequency bandwiths. By that these generators add another degree of freedom to your application: the frequency. You can change and optimize the frequency while the RF is on. In connection with the RF Broadband Generators the broadband automatch option shall be selected with the Matching Network.

rfg-3u-001.jpgRFG-BB-3U 2-100MHz ≤500W


Low Frequency Generators

For low frequency operation we offer the LFG series.

lfg-3u-001.jpgLFG-3U 40-500kHz ≤800W


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